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Specifications:
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| Diameter: |
f40.0mm,
f50.8mm,
f76.2mm ,
f101.6mm |
| Thickness: |
0.2~1.0mm |
| Orientation: |
X, Y, Z, 127.86 °Y, 64 °Y, 135 °Y |
| Ref. flat orientation: |
X or Y |
| Ref. Flat width: |
16± 2mm, 18± 2mm, 22± 2mm, 32± 2mm |
| Front polish: |
0.016 ~0.001μm |
| Back lapping: |
0.3 ~10 |
| Flatness: |
«15μm |
| Bow: |
«20μm for dia <18mm,
«40μm for dia 22 ~ 32mm |
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